Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes
نویسندگان
چکیده
منابع مشابه
Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes
In this paper a Cross Axis evaluation methodology is presented. The Cross Axis Sensitivity value depends on backend testing position tolerances as well as technological features and design properties of the MEMS gyroscope. A numerical model was developed to take into account the sources of cross axis related to the last two contributions, not considering backend tolerances. Given a specific str...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2017
ISSN: 2504-3900
DOI: 10.3390/proceedings1040281